<  Back to the Polytechnique Montréal portal

Optical in situ probing method for laser antifuse linking

R. Lachaine, E. Boulais and Michel Meunier

Article (2010)

An external link is available for this item
Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/18054/
Journal Title: Semiconductor Science and Technology (vol. 25, no. 6)
Publisher: IOP Publishing
DOI: 10.1088/0268-1242/25/6/065015
Official URL: https://doi.org/10.1088/0268-1242/25/6/065015
Date Deposited: 18 Apr 2023 15:13
Last Modified: 05 Apr 2024 10:59
Cite in APA 7: Lachaine, R., Boulais, E., & Meunier, M. (2010). Optical in situ probing method for laser antifuse linking. Semiconductor Science and Technology, 25(6), 065015-065015. https://doi.org/10.1088/0268-1242/25/6/065015



Repository Staff Only

View Item View Item