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Optical in situ probing method for laser antifuse linking

R. Lachaine, E. Boulais and Michel Meunier

Article (2010)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/18054/
Journal Title: Semiconductor Science and Technology (vol. 25, no. 6)
Publisher: IOP Publishing
DOI: 10.1088/0268-1242/25/6/065015
Official URL: https://doi.org/10.1088/0268-1242/25/6/065015
Date Deposited: 18 Apr 2023 15:13
Last Modified: 05 Apr 2024 10:59
Cite in APA 7: Lachaine, R., Boulais, E., & Meunier, M. (2010). Optical in situ probing method for laser antifuse linking. Semiconductor Science and Technology, 25(6), 065015-065015. https://doi.org/10.1088/0268-1242/25/6/065015

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