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Electrostatic MEMS: Modelling, control, and applications

Guchuan Zhu

Book Section (2010)

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Department: Department of Electrical Engineering
PolyPublie URL: https://publications.polymtl.ca/17398/
Editors: Jean Lévine and Philippe Müllhaupt
Publisher: Springer
DOI: 10.1007/978-3-642-16135-3_10
Official URL: https://doi.org/10.1007/978-3-642-16135-3_10
Date Deposited: 18 Apr 2023 15:14
Last Modified: 25 Sep 2024 15:55
Cite in APA 7: Zhu, G. (2010). Electrostatic MEMS: Modelling, control, and applications. In Lévine, J., & Müllhaupt, P. (eds.), Advances in the Theory of Control, Signals and Systems with Physical Modeling (Vol. 407, pp. 113-123). https://doi.org/10.1007/978-3-642-16135-3_10

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