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Prasai, K., Lee, K., Baloukas, B., Cheng, H. P., Fazio, M., Martinu, L., Mehta, A., Menoni, C. S., Schiettekatte, F., Shink, R., Shyam, B., Vajente, G., Fejer, M. M., & Bassiri, R. (2023). Effects of elevated-temperature deposition on the atomic structure of amorphous Ta₂O₅ films. APL Materials, 11(12), 121112 (8 pages). Disponible