Documents publiés en "2023"

Article de revue

Guertin, R., Lacasse, T., Lemieux-Leduc, C., Bianki, M.-A., & Peter, Y.-A. (2023). High-performance, low-cost on-chip Fabry-Perot interferometer with microfluidic channel using single anisotropic wet etching. Journal of Microelectromechanical Systems, 32(4), 347-351. Disponible