Documents publiés en "2006"

Département de génie physique

Lavoie, C., Detavernier, C., Cabral, C. J., d'Heurle, F. M., Kellock, A. J., Jordan-Sweet, J., & Harper, J. M. E. (2006). Effects of additive elements on the phase formation and morphological stability of nickel monosilicide films. Microelectronic Engineering, 83(11-12), 2042-2054. Lien externe