Documents publiés en "2003"

Communication écrite

Mackova, A., Perina, V., Hnatowicz, V., Supiot, P., Vivien, C., Bousquet, A., Granier, A., Boufayed, F., Escaich, D., Raynaud, P., Segui, Y., Dennler, G., Wertheimer, M. R., Stryhal, Z., & Pavlik, J. (juin 2003). Compared properties of Organosilicon films induced by RF and Microwave organosilicon/O₂ plasmas and afterglows [Communication écrite]. 16th International Symposium on Plasma Chemistry (ISPC 2003), Taormina, Italy (5 pages). Lien externe