Documents publiés en "2000"

Département de génie physique

Ressejac, I. C., Landsberger, L. M., & Currie, J. F. (2000). Bistable Microelectrothermal Actuator in a Standard Complementary Metal-Oxide-Semiconductor Process. Journal of vacuum science and technology. A, Vacuum, surfaces, and films, 18(2), 746-749. Lien externe