Documents publiés en "1999"
Monter d'un niveauNombre de documents: 1
Article de revue
Vlcek, J., Rusnak, K., Hajek, V., & Martinu, L. (1999). Reactive magnetron sputtering of CNₓ films : Ion bombardment effects and process characterization using optical emission spectroscopy. Journal of Applied Physics, 86(7), 3646-3654. Lien externe