Documents publiés en "1991"

Département de génie physique

Sundararaman, C. S., Lafontaine, H., Poulin, S., Mouton, A., & Currie, J. F. (1991). Reactive sputtering of InP in N₂ and N₂/O₂ plasmas. Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena, 9(3), 1433-1439. Lien externe