High-resolution x-ray diffraction to determine the self-limiting growth in atomic layer epitaxy of InP and InAs/InP heterostructures

C. A. Tran, Rémo A. Masut, John Low Brebner and Richard Leonelli

Article (1993)

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Department:	Department of Engineering Physics
Research Center:	GCM - Thin Film Physics and Technology Research Group
PolyPublie URL:	https://publications.polymtl.ca/70714/
Journal Title:	Applied Physics Letters (vol. 62, no. 19)
Publisher:	American Institute of Physics
DOI:	10.1063/1.109369
Official URL:	https://doi.org/10.1063/1.109369
Date Deposited:	22 Dec 2025 15:02
Last Modified:	22 Dec 2025 15:02

Cite in APA 7:	Tran, C. A., Masut, R. A., Brebner, J. L., & Leonelli, R. (1993). High-resolution x-ray diffraction to determine the self-limiting growth in atomic layer epitaxy of InP and InAs/InP heterostructures. Applied Physics Letters, 62(19), 2375-2377. https://doi.org/10.1063/1.109369
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