L. Paquin, John F. Currie, B. Noirhomme, S. Poulin-Dandurand, Edward Sacher, Michael R. Wertheimer
, Arthur Yelon, J. L. Brebner, R. W. Cochrane, R. Groleau, H. Lu and J. P. Martin
Paper (1983)
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| Department: | Department of Engineering Physics |
|---|---|
| Research Center: | GCM - Thin Film Physics and Technology Research Group |
| PolyPublie URL: | https://publications.polymtl.ca/66779/ |
| Conference Title: | 6th International Symposium on Plasma Chemistry (ISPC 1983) |
| Conference Location: | Montreal, Qc, Canada |
| Conference Date(s): | 1983-07-24 - 1983-07-28 |
| Official URL: | https://www.ispc-conference.org/ispcdocs/ispc6/con... |
| Date Deposited: | 28 Jul 2025 17:05 |
| Last Modified: | 22 Dec 2025 15:05 |
| Cite in APA 7: | Paquin, L., Currie, J. F., Noirhomme, B., Poulin-Dandurand, S., Sacher, E., Wertheimer, M. R., Yelon, A., Brebner, J. L., Cochrane, R. W., Groleau, R., Lu, H., & Martin, J. P. (1983, July). Comparison of amorphous silicon (a-Si:H) prepared in radio and microwave frequency glow discharges [Paper]. 6th International Symposium on Plasma Chemistry (ISPC 1983), Montreal, Qc, Canada (5 pages). https://www.ispc-conference.org/ispcdocs/ispc6/content/6/06-0787.pdf |
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