D. Poitras, O. M. Kuttel, Avi Raveh, Jolanta-Ewa Sapieha
, Ludvik Martinu and Michael R. Wertheimer
Paper (1991)
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| Department: | Department of Engineering Physics |
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| Research Center: | GCM - Thin Film Physics and Technology Research Group |
| PolyPublie URL: | https://publications.polymtl.ca/66767/ |
| Conference Title: | 10th International Symposium on Plasma Chemistry (ISPC 1991) |
| Conference Location: | Bochum, Germany |
| Conference Date(s): | 1991-08-04 - 1991-08-09 |
| Official URL: | https://www.ispc-conference.org/ispcdocs/ispc10/co... |
| Date Deposited: | 24 Jul 2025 16:45 |
| Last Modified: | 24 Jul 2025 16:45 |
| Cite in APA 7: | Poitras, D., Kuttel, O. M., Raveh, A., Sapieha, J.-E., Martinu, L., & Wertheimer, M. R. (1991, August). Comparison of processes in radio- and microwave frequency plasmas by optical emission spectroscopy [Paper]. 10th International Symposium on Plasma Chemistry (ISPC 1991), Bochum, Germany (6 pages). https://www.ispc-conference.org/ispcdocs/ispc10/content/10/10-2.1-46.pdf |
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