Michael R. Wertheimer
and M. Moisan
Paper (1993)
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| Department: | Department of Engineering Physics |
|---|---|
| Research Center: | GCM - Thin Film Physics and Technology Research Group |
| PolyPublie URL: | https://publications.polymtl.ca/66764/ |
| Conference Title: | 11th International Symposium on Plasma Chemistry (ISPC 1993) |
| Conference Location: | Loughborough, UK |
| Conference Date(s): | 1993-08-22 - 1993-08-27 |
| Official URL: | https://www.ispc-conference.org/ispcdocs/ispc11/co... |
| Date Deposited: | 24 Jul 2025 16:30 |
| Last Modified: | 24 Jul 2025 16:30 |
| Cite in APA 7: | Wertheimer, M. R., & Moisan, M. (1993, August). Processing of electronic materials by microwave plasma [Paper]. 11th International Symposium on Plasma Chemistry (ISPC 1993), Loughborough, UK. https://www.ispc-conference.org/ispcdocs/ispc11/content/11/11-1106.pdf |
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