P. Reinke, Oleg Zabeida, B. Andreani, S. Bureau and Ludvik Martinu
Paper (1995)
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| Department: | Department of Engineering Physics |
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| Research Center: | GCM - Thin Film Physics and Technology Research Group |
| PolyPublie URL: | https://publications.polymtl.ca/66763/ |
| Conference Title: | 12th International Symposium on Plasma Chemistry (ISPC 1995) |
| Conference Location: | Minneapolis, MN, USA |
| Conference Date(s): | 1995-08-21 - 1995-08-25 |
| Official URL: | https://www.ispc-conference.org/ispcdocs/ispc12/co... |
| Date Deposited: | 24 Jul 2025 15:34 |
| Last Modified: | 24 Jul 2025 15:34 |
| Cite in APA 7: | Reinke, P., Zabeida, O., Andreani, B., Bureau, S., & Martinu, L. (1995, August). Ion energy distribution functions in microwave and radio frequency [Paper]. 12th International Symposium on Plasma Chemistry (ISPC 1995), Minneapolis, MN, USA. https://www.ispc-conference.org/ispcdocs/ispc12/content/12/12-0499.pdf |
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