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VUV-visible emission spectroscopy investigation of frequency effects in low pressure plasmas

A. C. Fozza, M. Moisan and Michael R. Wertheimer

Paper (1999)

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Department: Department of Engineering Physics
Research Center: GCM - Thin Film Physics and Technology Research Group
PolyPublie URL: https://publications.polymtl.ca/66757/
Conference Title: 14th International Symposium on Plasma Chemistry (ISPC 1999)
Conference Location: Prague, Czech Republic
Conference Date(s): 1999-08-02 - 1999-08-06
Official URL: https://www.ispc-conference.org/ispcdocs/ispc14/co...
Date Deposited: 24 Jul 2025 14:58
Last Modified: 24 Jul 2025 14:58
Cite in APA 7: Fozza, A. C., Moisan, M., & Wertheimer, M. R. (1999, August). VUV-visible emission spectroscopy investigation of frequency effects in low pressure plasmas [Paper]. 14th International Symposium on Plasma Chemistry (ISPC 1999), Prague, Czech Republic. https://www.ispc-conference.org/ispcdocs/ispc14/content/14/14-0539.pdf

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