Luke A. MacQueen, Lubomir Zikovsky, G. Dennler, M. Latreche, G. Czeremuszkin and Michael R. Wertheimer
Paper (2005)
An external link is available for this item
| Department: | Department of Engineering Physics |
|---|---|
| Research Center: | GCM - Thin Film Physics and Technology Research Group |
| Funders: | NSERC |
| PolyPublie URL: | https://publications.polymtl.ca/66745/ |
| Conference Title: | 17th International Symposium on Plasma Chemistry (ISPC 2005) |
| Conference Location: | Toronto, ON, Canada |
| Conference Date(s): | 2005-08-07 - 2005-08-12 |
| Official URL: | https://www.ispc-conference.org/ispcdocs/ispc17/co... |
| Date Deposited: | 24 Jul 2025 11:56 |
| Last Modified: | 24 Jul 2025 11:56 |
| Cite in APA 7: | MacQueen, L. A., Zikovsky, L., Dennler, G., Latreche, M., Czeremuszkin, G., & Wertheimer, M. R. (2005, August). PECVD of nanocrystalline Si layers on high Tg polymer substrates [Paper]. 17th International Symposium on Plasma Chemistry (ISPC 2005), Toronto, ON, Canada. https://www.ispc-conference.org/ispcdocs/ispc17/complete/ISPC17complete.pdf#page=2397 |
|---|---|
Statistics
Stats are not available on this system.
Repository Staff Only
|
View Item |
