Régis Guertin, Marc-Antoine Bianki, Cédric Lemieux-Leduc and Yves-Alain Peter
Article (2021)
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Accepted Version Terms of Use: Creative Commons Attribution Non-commercial No Derivatives . Restricted to: Repository staff only until 16 February 2023. Request a copy |
| Cite this document: | Guertin, R., Bianki, M.-A., Lemieux-Leduc, C. & Peter, Y.-A. (2021). Multi-gas detection using Fabry-Perot interferometers on silicon chip. Sensors and Actuators B: Chemical, 335. doi:10.1016/j.snb.2021.129655 |
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Abstract
This work presents an all optical on chip integrated gas sensor array for sensing multiple gas simultaneously using non-specific polymers as the sensing material. The individual sensors are vertically etched into silicon. They are made of two Bragg mirrors forming a Fabry-Perot cavity which is functionalized with different polymers such as polyethylene glycol (PEG), SU-8 and polydimethylsiloxane (PDMS). Multi-gas detection was achieved for various gas mixtures of isopropyl alcohol (IPA), HO, valeric acid and butanol. Using a linear model, we report limits of detection as low as 8.1 parts per million (ppm) for valeric acid within mixture
Uncontrolled Keywords
Gas sensing; Fabry-Perot; Polymer; Non-specific detection
 Open Access document in PolyPublie |
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| Subjects: |
3100 Physique > 3100 Physique 3100 Physique > 3108 Méthodes expérimentales et instrumentation |
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| Department: | Département de génie physique |
| Research Center: | Non applicable |
| Date Deposited: | 04 May 2021 18:02 |
| Last Modified: | 05 May 2021 01:20 |
| PolyPublie URL: | https://publications.polymtl.ca/6277/ |
 Document issued by the official publisher |
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| Journal Title: | Sensors and Actuators B: Chemical (vol. 335) |
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| Publisher: | Elsevier |
| Official URL: | https://doi.org/10.1016/j.snb.2021.129655 |
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