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Multi-gas detection using Fabry-Perot interferometers on silicon chip

Régis Guertin, Marc-Antoine Bianki, Cédric Lemieux-Leduc and Yves-Alain Peter

Article (2021)

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Cite this document: Guertin, R., Bianki, M.-A., Lemieux-Leduc, C. & Peter, Y.-A. (2021). Multi-gas detection using Fabry-Perot interferometers on silicon chip. Sensors and Actuators B: Chemical, 335. doi:10.1016/j.snb.2021.129655
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Abstract

This work presents an all optical on chip integrated gas sensor array for sensing multiple gas simultaneously using non-specific polymers as the sensing material. The individual sensors are vertically etched into silicon. They are made of two Bragg mirrors forming a Fabry-Perot cavity which is functionalized with different polymers such as polyethylene glycol (PEG), SU-8 and polydimethylsiloxane (PDMS). Multi-gas detection was achieved for various gas mixtures of isopropyl alcohol (IPA), HO, valeric acid and butanol. Using a linear model, we report limits of detection as low as 8.1 parts per million (ppm) for valeric acid within mixture

Uncontrolled Keywords

Gas sensing; Fabry-Perot; Polymer; Non-specific detection

Open Access document in PolyPublie
Subjects: 3100 Physique > 3100 Physique
3100 Physique > 3108 Méthodes expérimentales et instrumentation
Department: Département de génie physique
Research Center: Non applicable
Date Deposited: 04 May 2021 18:02
Last Modified: 05 May 2021 01:20
PolyPublie URL: https://publications.polymtl.ca/6277/
Document issued by the official publisher
Journal Title: Sensors and Actuators B: Chemical (vol. 335)
Publisher: Elsevier
Official URL: https://doi.org/10.1016/j.snb.2021.129655

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