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Synthesis of thin films and coatings by high power impulse magnetron sputtering

Kostas Sarakinos and Ludvik Martinu

Book Section (2019)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/61183/
Editors: Daniel Lundin, Tiberiu Minea and Jon Tomas Gudmundsson
Journal Title: Elsevier eBooks
Publisher: Elsevier BV
DOI: 10.1016/b978-0-12-812454-3.00013-9
Official URL: https://doi.org/10.1016/b978-0-12-812454-3.00013-9
Date Deposited: 17 Dec 2024 12:06
Last Modified: 17 Dec 2024 12:06
Cite in APA 7: Sarakinos, K., & Martinu, L. (2019). Synthesis of thin films and coatings by high power impulse magnetron sputtering. In Lundin, D., Minea, T., & Gudmundsson, J. T. (eds.), High Power Impulse Magnetron Sputtering (pp. 333-374). https://doi.org/10.1016/b978-0-12-812454-3.00013-9

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