Marc-Antoine Bianki, Régis Guertin, Cédric Lemieux-Leduc et Yves-Alain Peter
Article de revue (2024)
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Abstract
Investigation of drop-on-demand inkjet printing as a fabrication method for an optical gas sensor reveals its potential to incorporate multiple sensing materials on a single microchip. Through this additive method, three distinct polymers—SU-8, polystyrene (PS), and polyhexamethylene biguanide (PHMB)—were deposited onto a silicon substrate and suspended, allowing the polymer microdroplets to expand freely. The coupling to these whispering gallery mode resonators with a tapered optical fiber allows measuring high quality factors exceeding 106. The gas sensing capabilities of all three polymers were studied for three different gases: isopropanol, water, and carbon dioxide. Sensitivities of up to 0.25 pm/ppmv and limits of detection as low as 14 ppmv were achieved.
Mots clés
gas sensor; whispering gallery mode resonator; drop-on-demand inkjet printing; polymer
| Sujet(s): | 3100 Physique > 3100 Physique |
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| Département: | Département de génie physique |
| Organismes subventionnaires: | CRSNG/NSERC, Canadian Microelectronics Corporation (CMC), Fonds de recherche du Québec - Nature et technologies, Canada (FRQNT) |
| Numéro de subvention: | RGPIN-2020-06692, ALLRP 577113–2022, ESD3-534843-2019, B2X 271283 |
| URL de PolyPublie: | https://publications.polymtl.ca/59158/ |
| Titre de la revue: | Sensors and Actuators B: Chemical (vol. 420) |
| Maison d'édition: | Elsevier |
| DOI: | 10.1016/j.snb.2024.136460 |
| URL officielle: | https://doi.org/10.1016/j.snb.2024.136460 |
| Date du dépôt: | 30 août 2024 11:22 |
| Dernière modification: | 31 oct. 2024 00:07 |
| Citer en APA 7: | Bianki, M.-A., Guertin, R., Lemieux-Leduc, C., & Peter, Y.-A. (2024). Suspended whispering gallery mode resonators made of different polymers and fabricated using drop-on-demand inkjet printing for gas sensing applications. Sensors and Actuators B: Chemical, 420, 136460 (8 pages). https://doi.org/10.1016/j.snb.2024.136460 |
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