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Low-cost fabrication of an on-chip Fabry-Perot interferometer for dry environmental monitoring

Régis Guertin, Marc-Antoine Bianki and Yves-Alain Peter

Paper (2023)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/56084/
Conference Title: International Conference on Optical MEMS and Nanophotonics (OMN) and SBFoton International Optics and Photonics Conference (SBFoton IOPC 2023)
Conference Location: Campinas, Brazil
Conference Date(s): 2023-07-31 - 2023-08-03
Publisher: IEEE
DOI: 10.1109/omn/sbfotoniopc58971.2023.10230951
Official URL: https://doi.org/10.1109/omn/sbfotoniopc58971.2023....
Date Deposited: 02 Nov 2023 15:35
Last Modified: 05 Apr 2024 12:03
Cite in APA 7: Guertin, R., Bianki, M.-A., & Peter, Y.-A. (2023, July). Low-cost fabrication of an on-chip Fabry-Perot interferometer for dry environmental monitoring [Paper]. International Conference on Optical MEMS and Nanophotonics (OMN) and SBFoton International Optics and Photonics Conference (SBFoton IOPC 2023), Campinas, Brazil (2 pages). https://doi.org/10.1109/omn/sbfotoniopc58971.2023.10230951

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