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Properties of multilayer and graded index Si-based coatings deposited in dual-frequency plasma

Daniel Poitras, Jolanta-Ewa Sapieha, A. Moussi and Ludvik Martinu

Paper (1993)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/55531/
Conference Title: Optics Quebec, 1993
Conference Location: Quebec City, Canada
Conference Date(s): 1993
Journal Title: Proceedings of SPIE (vol. 2046)
Publisher: SPIE
DOI: 10.1117/12.163547
Official URL: https://doi.org/10.1117/12.163547
Date Deposited: 20 Sep 2023 12:34
Last Modified: 05 Apr 2024 12:02
Cite in APA 7: Poitras, D., Sapieha, J.-E., Moussi, A., & Martinu, L. (1993). Properties of multilayer and graded index Si-based coatings deposited in dual-frequency plasma [Paper]. Optics Quebec, 1993, Quebec City, Canada (10 pages). Published in Proceedings of SPIE, 2046. https://doi.org/10.1117/12.163547

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