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Fabrication of Fabry-Perot filters using porous-dense silicon nitride stacks with optimized interfaces

Richard Vernhes, Aram Amassian, Jolanta-Ewa Sapieha and Ludvik Martinu

Paper (2004)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/53272/
Conference Title: Optical Interference Coatings
Conference Location: Tucson, Arizona, USA
Conference Date(s): 2004-06-27 - 2004-07-02
Publisher: OSA
DOI: 10.1364/oic.2004.thd4
Official URL: https://doi.org/10.1364/oic.2004.thd4
Date Deposited: 18 Apr 2023 15:19
Last Modified: 05 Apr 2024 11:58
Cite in APA 7: Vernhes, R., Amassian, A., Sapieha, J.-E., & Martinu, L. (2004, June). Fabrication of Fabry-Perot filters using porous-dense silicon nitride stacks with optimized interfaces [Paper]. Optical Interference Coatings, Tucson, Arizona, USA. https://doi.org/10.1364/oic.2004.thd4

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