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Hybrid octa-silane polyhedral oligomeric silsesquioxane (OS-POSS) optical films prepared by ion beam assisted evaporation

Artem Shelemin, Oleg Zabeida, Jincheng Qian, Jolanta-Ewa Sapieha and Ludvik Martinu

Article (2023)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/53205/
Journal Title: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films (vol. 41, no. 2)
Publisher: AVS Science and Technology Society
DOI: 10.1116/6.0002371
Official URL: https://doi.org/10.1116/6.0002371
Date Deposited: 18 Apr 2023 14:58
Last Modified: 05 Apr 2024 11:58
Cite in APA 7: Shelemin, A., Zabeida, O., Qian, J., Sapieha, J.-E., & Martinu, L. (2023). Hybrid octa-silane polyhedral oligomeric silsesquioxane (OS-POSS) optical films prepared by ion beam assisted evaporation. Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 41(2), 15 pages. https://doi.org/10.1116/6.0002371

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