Jonathan Masson, Fatou Koné and Yves-Alain Peter
Paper (2007)
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| Department: | Department of Engineering Physics |
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| PolyPublie URL: | https://publications.polymtl.ca/52998/ |
| Conference Title: | International Symposium on Optomechatronic Technologies |
| Conference Location: | Lausanne, Switzerland |
| Conference Date(s): | 2007-10-08 - 2007-10-10 |
| Publisher: | SPIE |
| DOI: | 10.1117/12.754325 |
| Official URL: | https://doi.org/10.1117/12.754325 |
| Date Deposited: | 18 Apr 2023 15:17 |
| Last Modified: | 08 Apr 2025 07:21 |
| Cite in APA 7: | Masson, J., Koné, F., & Peter, Y.-A. (2007, October). MEMS tunable silicon Fabry-Perot cavity [Paper]. International Symposium on Optomechatronic Technologies, Lausanne, Switzerland. https://doi.org/10.1117/12.754325 |
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