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MEMS tunable silicon Fabry-Perot cavity

Jonathan Masson, Fatou Koné and Yves-Alain Peter

Paper (2007)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/52998/
Conference Title: International Symposium on Optomechatronic Technologies
Conference Location: Lausanne, Switzerland
Conference Date(s): 2007-10-08 - 2007-10-10
Publisher: SPIE
DOI: 10.1117/12.754325
Official URL: https://doi.org/10.1117/12.754325
Date Deposited: 18 Apr 2023 15:17
Last Modified: 05 Apr 2024 11:58
Cite in APA 7: Masson, J., Koné, F., & Peter, Y.-A. (2007, October). MEMS tunable silicon Fabry-Perot cavity [Paper]. International Symposium on Optomechatronic Technologies, Lausanne, Switzerland. https://doi.org/10.1117/12.754325

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