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ZrO₂ optical coatings with high toughness deposited by magnetron sputtering

Jincheng Qian, Bill Baloukas, Étienne Bousser, Carlo A. Kosik Williams, James J. Price, Charles A. Paulson, Shandon D. Hart, Karl W. Koch, Robert A. Bellman, Jolanta-Ewa Sapieha and Ludvik Martinu

Paper (2022)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/52137/
Conference Title: Optical Interference Coatings (OIC 2022)
Conference Location: Vancouver, BC, Canada
Conference Date(s): 2022-06-19 - 2022-06-24
Publisher: Optica Publishing Group (formerly OSA)
DOI: 10.1364/oic.2022.tha.6
Official URL: https://doi.org/10.1364/oic.2022.tha.6
Date Deposited: 18 Apr 2023 14:59
Last Modified: 05 Apr 2024 11:56
Cite in APA 7: Qian, J., Baloukas, B., Bousser, É., Kosik Williams, C. A., Price, J. J., Paulson, C. A., Hart, S. D., Koch, K. W., Bellman, R. A., Sapieha, J.-E., & Martinu, L. (2022, June). ZrO₂ optical coatings with high toughness deposited by magnetron sputtering [Paper]. Optical Interference Coatings (OIC 2022), Vancouver, BC, Canada. https://doi.org/10.1364/oic.2022.tha.6

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