Rapid thermally annealed ohmic contacts to high temperature Zn implanted InP

C. S. Sundararaman and John F. Currie

Paper (1991)

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Department:	Department of Engineering Physics
PolyPublie URL:	https://publications.polymtl.ca/44506/
Conference Title:	Emerging Optoelectronic Technologies
Conference Location:	Bangalore, India
Conference Date(s):	1991-12-16
Publisher:	SPIE
DOI:	10.1117/12.636908
Official URL:	https://doi.org/10.1117/12.636908
Date Deposited:	18 Apr 2023 15:26
Last Modified:	25 Sep 2024 16:31

Cite in APA 7:	Sundararaman, C. S., & Currie, J. F. (1991, December). Rapid thermally annealed ohmic contacts to high temperature Zn implanted InP [Paper]. Emerging Optoelectronic Technologies, Bangalore, India. https://doi.org/10.1117/12.636908
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