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Tailoring angular selectivity in SiO₂ slanted columnar thin films using atomic layer deposition of titanium nitride

Sasha Woodward-Gagné, Nicolas Desjardins-Lecavalier, Bill Baloukas, Oleg Zabeida and Ludvik Martinu

Article (2019)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/44137/
Journal Title: Optical Materials Express (vol. 9, no. 12)
Publisher: OSA
DOI: 10.1364/ome.9.004556
Official URL: https://doi.org/10.1364/ome.9.004556
Date Deposited: 18 Apr 2023 15:02
Last Modified: 05 Apr 2024 11:42
Cite in APA 7: Woodward-Gagné, S., Desjardins-Lecavalier, N., Baloukas, B., Zabeida, O., & Martinu, L. (2019). Tailoring angular selectivity in SiO₂ slanted columnar thin films using atomic layer deposition of titanium nitride. Optical Materials Express, 9(12), 4556-4563. https://doi.org/10.1364/ome.9.004556

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