Deposition of hard carbon coatings using combined inductively and capacitively coupled plasma sources

G. F. Zhang, Stephan Reuter and V. Buck

Article (2005)

Document published while its authors were not affiliated with Polytechnique Montréal

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PolyPublie URL:	https://publications.polymtl.ca/44039/
Journal Title:	Surface and Coatings Technology (vol. 190, no. 1)
Publisher:	Elsevier
DOI:	10.1016/j.surfcoat.2004.04.061
Official URL:	https://doi.org/10.1016/j.surfcoat.2004.04.061
Date Deposited:	18 Apr 2023 15:19
Last Modified:	25 Sep 2024 16:31

Cite in APA 7:	Zhang, G. F., Reuter, S., & Buck, V. (2005). Deposition of hard carbon coatings using combined inductively and capacitively coupled plasma sources. Surface and Coatings Technology, 190(1), 54-59. https://doi.org/10.1016/j.surfcoat.2004.04.061
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