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Hard titanium nitride coating deposition inside narrow tubes using pulsed DC PECVD processes

A. Kilicaslan, O. Zabeida, E. Bousser, T. Schmitt, Jolanta-Ewa Sapieha and Ludvik Martinu

Article (2019)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/43716/
Journal Title: Surface and Coatings Technology (vol. 377)
Publisher: Elsevier B.V.
DOI: 10.1016/j.surfcoat.2019.124894
Official URL: https://doi.org/10.1016/j.surfcoat.2019.124894
Date Deposited: 18 Apr 2023 15:02
Last Modified: 05 Apr 2024 11:42
Cite in APA 7: Kilicaslan, A., Zabeida, O., Bousser, E., Schmitt, T., Sapieha, J.-E., & Martinu, L. (2019). Hard titanium nitride coating deposition inside narrow tubes using pulsed DC PECVD processes. Surface and Coatings Technology, 377, 124894 (10 pages). https://doi.org/10.1016/j.surfcoat.2019.124894

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