Satoshi Hamaguchi, Sumit Agarwal, Lenka Zajickova and Michael R. Wertheimer
Article (2019)
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| Department: | Department of Engineering Physics |
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| PolyPublie URL: | https://publications.polymtl.ca/43658/ |
| Journal Title: | Plasma Processes and Polymers (vol. 16, no. 9) |
| Publisher: | Wiley-VCH Verlag |
| DOI: | 10.1002/ppap.201990001 |
| Official URL: | https://doi.org/10.1002/ppap.201990001 |
| Date Deposited: | 18 Apr 2023 15:02 |
| Last Modified: | 08 Jun 2023 11:52 |
| Cite in APA 7: | Hamaguchi, S., Agarwal, S., Zajickova, L., & Wertheimer, M. R. (2019). Special issue: Plasmas for micro-fabrication. Plasma Processes and Polymers, 16(9), 2 pages. https://doi.org/10.1002/ppap.201990001 |
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