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Special issue: Plasmas for micro-fabrication

Satoshi Hamaguchi, Sumit Agarwal, Lenka Zajíčková and Michael R. Wertheimer

Article (2019)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/43658/
Journal Title: Plasma Processes and Polymers (vol. 16, no. 9)
Publisher: Wiley-VCH Verlag
DOI: 10.1002/ppap.201990001
Official URL: https://doi.org/10.1002/ppap.201990001
Date Deposited: 18 Apr 2023 15:02
Last Modified: 05 Apr 2024 11:41
Cite in APA 7: Hamaguchi, S., Agarwal, S., Zajíčková, L., & Wertheimer, M. R. (2019). Special issue: Plasmas for micro-fabrication. Plasma Processes and Polymers, 16(9), 2 pages. https://doi.org/10.1002/ppap.201990001



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