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Effect of bias and temperature on the bulk and surface properties of gold-containing plasma-polymerized fluorocarbons

R. d'Agostino, Ludvik Martinu and V. Pische

Article (1991)

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Department: Department of Engineering Physics
Research Center: GCM - Thin Film Physics and Technology Research Group
PolyPublie URL: https://publications.polymtl.ca/42003/
Journal Title: Plasma Chemistry and Plasma Processing (vol. 11, no. 1)
Publisher: Springer
DOI: 10.1007/bf01447031
Official URL: https://doi.org/10.1007/bf01447031
Date Deposited: 18 Apr 2023 15:26
Last Modified: 25 Sep 2024 16:28
Cite in APA 7: d'Agostino, R., Martinu, L., & Pische, V. (1991). Effect of bias and temperature on the bulk and surface properties of gold-containing plasma-polymerized fluorocarbons. Plasma Chemistry and Plasma Processing, 11(1), 1-13. https://doi.org/10.1007/bf01447031

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