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Effect of substrate bias on the microstructure and properties of nanocomposite titanium nitride-based films

M. Dudek, O. Zabeida, Jolanta-Ewa Sapieha and Ludvik Martinu

Article (2009)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/41979/
Journal Title: Journal of Achievements in Materials and Manufacturing Engineering (vol. 37, no. 2)
Official URL: http://jamme.acmsse.h2.pl/papers_vol37_2/37228.pdf
Date Deposited: 18 Apr 2023 15:14
Last Modified: 05 Apr 2024 11:39
Cite in APA 7: Dudek, M., Zabeida, O., Sapieha, J.-E., & Martinu, L. (2009). Effect of substrate bias on the microstructure and properties of nanocomposite titanium nitride-based films. Journal of Achievements in Materials and Manufacturing Engineering, 37(2), 416-421. http://jamme.acmsse.h2.pl/papers_vol37_2/37228.pdf

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