Viktor Marushka, Oleg Zabeida and Ludvik Martinu
Article (2014)
An external link is available for this itemDepartment: | Department of Engineering Physics |
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PolyPublie URL: | https://publications.polymtl.ca/41875/ |
Journal Title: | Journal of Vacuum Science & Technology A (vol. 32, no. 6) |
Publisher: | American Institute of Physics |
DOI: | 10.1116/1.4900541 |
Official URL: | https://doi.org/10.1116/1.4900541 |
Date Deposited: | 18 Apr 2023 15:08 |
Last Modified: | 25 Sep 2024 16:27 |
Cite in APA 7: | Marushka, V., Zabeida, O., & Martinu, L. (2014). Distribution of ion current density on a rotating spherical cap substrate during ion-assisted deposition. Journal of Vacuum Science & Technology A, 32(6), 61513-61513. https://doi.org/10.1116/1.4900541 |
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