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Distribution of ion current density on a rotating spherical cap substrate during ion-assisted deposition

Viktor Marushka, Oleg Zabeida and Ludvik Martinu

Article (2014)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/41875/
Journal Title: Journal of Vacuum Science & Technology A (vol. 32, no. 6)
Publisher: American Institute of Physics
DOI: 10.1116/1.4900541
Official URL: https://doi.org/10.1116/1.4900541
Date Deposited: 18 Apr 2023 15:08
Last Modified: 05 Apr 2024 11:39
Cite in APA 7: Marushka, V., Zabeida, O., & Martinu, L. (2014). Distribution of ion current density on a rotating spherical cap substrate during ion-assisted deposition. Journal of Vacuum Science & Technology A, 32(6), 61513-61513. https://doi.org/10.1116/1.4900541

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