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Means for generating a microwave plasma for the treatment of substrates, particularly for plasma polymerization of monomeric

Michael R. Wertheimer

Patent (1993)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/40025/
Publisher: École Polytechnique de MontréalÉcole Polytechnique, Palaiseau
Official URL: https://patents.google.com/patent/DE4132556
Date Deposited: 18 Apr 2023 15:26
Last Modified: 05 Apr 2024 11:35
Cite in APA 7: Wertheimer, M. R. (1993). Means for generating a microwave plasma for the treatment of substrates, particularly for plasma polymerization of monomeric. (Patent no. DE4132556). https://patents.google.com/patent/DE4132556

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