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Method of producing a high density pattern of isolated clusters

Edward Sacher, Konstantinos Piyakis and De-Quan Yang

Patent Application (2004)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/39934/
Publisher: Corporation de l'École Polytechnique de Montréal
Official URL: https://patents.google.com/patent/WO2004035855
Date Deposited: 18 Apr 2023 15:19
Last Modified: 05 Apr 2024 11:35
Cite in APA 7: Sacher, E., Piyakis, K., & Yang, D.-Q. (2004). Method of producing a high density pattern of isolated clusters. (Patent Application no. WO2004035855). https://patents.google.com/patent/WO2004035855

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