Effect of hydrogen implantation on the mechanical properties of AlN throughout ion-induced splitting

M. A. Mamun, K. Tapily, Oussama Moutanabbir, H. Baumgart and A. A. Elmustafa

Article (2018)

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Department:	Department of Engineering Physics
PolyPublie URL:	https://publications.polymtl.ca/39821/
Journal Title:	ECS Journal of Solid State Science and Technology (vol. 7, no. 4)
Publisher:	The Electrochemical Society
DOI:	10.1149/2.0131804jss
Official URL:	https://doi.org/10.1149/2.0131804jss
Date Deposited:	18 Apr 2023 15:03
Last Modified:	25 Sep 2024 16:25

Cite in APA 7:	Mamun, M. A., Tapily, K., Moutanabbir, O., Baumgart, H., & Elmustafa, A. A. (2018). Effect of hydrogen implantation on the mechanical properties of AlN throughout ion-induced splitting. ECS Journal of Solid State Science and Technology, 7(4), P180-P184. https://doi.org/10.1149/2.0131804jss
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