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Effect of hydrogen implantation on the mechanical properties of AlN throughout ion-induced splitting

M. A. Mamun, K. Tapily, Oussama Moutanabbir, H. Baumgart and A. A. Elmustafa

Article (2018)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/39821/
Journal Title: ECS Journal of Solid State Science and Technology (vol. 7, no. 4)
Publisher: The Electrochemical Society
DOI: 10.1149/2.0131804jss
Official URL: https://doi.org/10.1149/2.0131804jss
Date Deposited: 18 Apr 2023 15:03
Last Modified: 05 Apr 2024 11:35
Cite in APA 7: Mamun, M. A., Tapily, K., Moutanabbir, O., Baumgart, H., & Elmustafa, A. A. (2018). Effect of hydrogen implantation on the mechanical properties of AlN throughout ion-induced splitting. ECS Journal of Solid State Science and Technology, 7(4), P180-P184. https://doi.org/10.1149/2.0131804jss

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