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Plasma-Enhanced Chemical Vapor Deposition of Functional Coatings

Ludvik Martinu, O. Zabeida and Jolanta-Ewa Sapieha

Book Section (2010)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/38362/
Publisher: Elsevier
DOI: 10.1016/b978-0-8155-2031-3.00009-0
Official URL: https://doi.org/10.1016/b978-0-8155-2031-3.00009-0
Date Deposited: 18 Apr 2023 15:13
Last Modified: 05 Apr 2024 11:32
Cite in APA 7: Martinu, L., Zabeida, O., & Sapieha, J.-E. (2010). Plasma-Enhanced Chemical Vapor Deposition of Functional Coatings. In Handbook of deposition technologies for films and coatings : science, applications and technologu (392-465). https://doi.org/10.1016/b978-0-8155-2031-3.00009-0

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