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Microwave and Dual-Frequency Plasma Processing

Michael R. Wertheimer, Ludvik Martinu and M. Moisan

Book Section (1997)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/38293/
Editors: Ricardo d'Agostino, Pietro Favia and Francesco Fracassi
Publisher: Kluwer Academic
Official URL: https://link.springer.com/book/9780792348597
Date Deposited: 18 Apr 2023 15:23
Last Modified: 05 Apr 2024 11:32
Cite in APA 7: Wertheimer, M. R., Martinu, L., & Moisan, M. (1997). Microwave and Dual-Frequency Plasma Processing. In d'Agostino, R., Favia, P., & Fracassi, F. (eds.), Plasma Processing of Polymers (101-127). https://link.springer.com/book/9780792348597


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