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Ion Bombardment Effects in Dual Microwave/Radio Frequency Plasmas

Michael R. Wertheimer and Ludvik Martinu

Book Section (1993)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/38292/
Editors: Carlos M. Ferreira and Michel Moisan
Publisher: Springer
DOI: 10.1007/978-1-4899-1130-8_29
Official URL: https://doi.org/10.1007/978-1-4899-1130-8_29
Date Deposited: 18 Apr 2023 15:26
Last Modified: 05 Apr 2024 11:32
Cite in APA 7: Wertheimer, M. R., & Martinu, L. (1993). Ion Bombardment Effects in Dual Microwave/Radio Frequency Plasmas. In Ferreira, C. M., & Moisan, M. (eds.), Microwave Discharges: Fundamentals and Applications (Vol. 302, 465-479). https://doi.org/10.1007/978-1-4899-1130-8_29

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