Michael R. Wertheimer
and Ludvik Martinu
Book Section (1993)
An external link is available for this item
| Department: | Department of Engineering Physics |
|---|---|
| PolyPublie URL: | https://publications.polymtl.ca/38292/ |
| Editors: | Carlos M. Ferreira and Michel Moisan |
| Publisher: | Springer |
| DOI: | 10.1007/978-1-4899-1130-8_29 |
| Official URL: | https://doi.org/10.1007/978-1-4899-1130-8_29 |
| Date Deposited: | 18 Apr 2023 15:26 |
| Last Modified: | 25 Sep 2024 16:22 |
| Cite in APA 7: | Wertheimer, M. R., & Martinu, L. (1993). Ion Bombardment Effects in Dual Microwave/Radio Frequency Plasmas. In Ferreira, C. M., & Moisan, M. (eds.), Microwave Discharges: Fundamentals and Applications (Vol. 302, pp. 465-479). https://doi.org/10.1007/978-1-4899-1130-8_29 |
|---|---|
Statistics
Dimensions
Repository Staff Only
|
View Item |
