<  Back to the Polytechnique Montréal portal

Deposition and properties of diamondlike carbon films produced in microwave and radio‐frequency plasma

A. Raveh, Jolanta-Ewa Sapieha, Ludvik Martinu and Michael R. Wertheimer

Article (1992)

An external link is available for this item
Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/38285/
Journal Title: Journal of vacuum science and technology. A, Vacuum, surfaces, and films (vol. 10, no. 4)
Publisher: American Vacuum Society
DOI: 10.1116/1.577777
Official URL: https://doi.org/10.1116/1.577777
Date Deposited: 18 Apr 2023 15:26
Last Modified: 05 Apr 2024 11:32
Cite in APA 7: Raveh, A., Sapieha, J.-E., Martinu, L., & Wertheimer, M. R. (1992). Deposition and properties of diamondlike carbon films produced in microwave and radio‐frequency plasma. Journal of vacuum science and technology. A, Vacuum, surfaces, and films, 10(4), 1723-1727. https://doi.org/10.1116/1.577777

Statistics

Dimensions

Repository Staff Only

View Item View Item