A. Raveh, Jolanta-Ewa Sapieha
, Ludvik Martinu and Michael R. Wertheimer
Article (1992)
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| Department: | Department of Engineering Physics |
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| Research Center: | GCM - Thin Film Physics and Technology Research Group |
| PolyPublie URL: | https://publications.polymtl.ca/38285/ |
| Journal Title: | Journal of vacuum science and technology. A, Vacuum, surfaces, and films (vol. 10, no. 4) |
| Publisher: | American Vacuum Society |
| DOI: | 10.1116/1.577777 |
| Official URL: | https://doi.org/10.1116/1.577777 |
| Date Deposited: | 18 Apr 2023 15:26 |
| Last Modified: | 08 Apr 2025 07:01 |
| Cite in APA 7: | Raveh, A., Sapieha, J.-E., Martinu, L., & Wertheimer, M. R. (1992). Deposition and properties of diamondlike carbon films produced in microwave and radio‐frequency plasma. Journal of vacuum science and technology. A, Vacuum, surfaces, and films, 10(4), 1723-1727. https://doi.org/10.1116/1.577777 |
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