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Structural and vibrational properties of silicon dioxide thin films densified by medium-energy particles bombardment

Alexis Lefèvre, Laurent J. Lewis, Ludvik Martinu and Michael R. Wertheimer

Article (2011)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/38275/
Journal Title: MRS Proceedings (vol. 677)
Publisher: Cambridge University Press
DOI: 10.1557/proc-677-aa4.21
Official URL: https://doi.org/10.1557/proc-677-aa4.21
Date Deposited: 18 Apr 2023 15:12
Last Modified: 05 Apr 2024 11:32
Cite in APA 7: Lefèvre, A., Lewis, L. J., Martinu, L., & Wertheimer, M. R. (2011). Structural and vibrational properties of silicon dioxide thin films densified by medium-energy particles bombardment. MRS Proceedings, 677. https://doi.org/10.1557/proc-677-aa4.21

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