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Diamond-like carbon films deposited in a dual microwave-radio-frequency plasma

O. M. Küttel, Ludvik Martinu, D. Poitras, Jolanta-Ewa Sapieha and Michael R. Wertheimer

Article (1992)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/38274/
Journal Title: Materials Science and Engineering: B (vol. 11, no. 1)
Publisher: Elsevier
DOI: 10.1016/0921-5107(92)90233-y
Official URL: https://doi.org/10.1016/0921-5107%2892%2990233-y
Date Deposited: 18 Apr 2023 15:26
Last Modified: 05 Apr 2024 11:32
Cite in APA 7: Küttel, O. M., Martinu, L., Poitras, D., Sapieha, J.-E., & Wertheimer, M. R. (1992). Diamond-like carbon films deposited in a dual microwave-radio-frequency plasma. Materials Science and Engineering: B, 11(1), 321-324. https://doi.org/10.1016/0921-5107%2892%2990233-y

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