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Energy fluxes in mixed microwave-r.f. plasma

O. M. Küttel, Jolanta-Ewa Sapieha, Ludvik Martinu and Michael R. Wertheimer

Article (1990)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/38273/
Journal Title: Thin Solid Films (vol. 193)
Publisher: Elsevier
DOI: 10.1016/s0040-6090(05)80023-9
Official URL: https://doi.org/10.1016/s0040-6090%2805%2980023-9
Date Deposited: 18 Apr 2023 15:26
Last Modified: 05 Apr 2024 11:32
Cite in APA 7: Küttel, O. M., Sapieha, J.-E., Martinu, L., & Wertheimer, M. R. (1990). Energy fluxes in mixed microwave-r.f. plasma. Thin Solid Films, 193, 155-163. https://doi.org/10.1016/s0040-6090%2805%2980023-9



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