Jolanta-Ewa Sapieha, O. M. Küttel, Ludvik Martinu and Michael R. Wertheimer
Article (1991)
An external link is available for this itemDepartment: | Department of Engineering Physics |
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Research Center: | GCM - Thin Film Physics and Technology Research Group |
PolyPublie URL: | https://publications.polymtl.ca/38268/ |
Journal Title: | Journal of vacuum science and technology. A, Vacuum, surfaces, and films (vol. 9, no. 6) |
Publisher: | American Vacuum Society |
DOI: | 10.1116/1.577158 |
Official URL: | https://doi.org/10.1116/1.577158 |
Date Deposited: | 18 Apr 2023 15:26 |
Last Modified: | 25 Sep 2024 16:22 |
Cite in APA 7: | Sapieha, J.-E., Küttel, O. M., Martinu, L., & Wertheimer, M. R. (1991). Dual‐frequency N₂ and NH₃ plasma modification of polyethylene and polyimide. Journal of vacuum science and technology. A, Vacuum, surfaces, and films, 9(6), 2975-2981. https://doi.org/10.1116/1.577158 |
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