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Dual‐frequency N₂ and NH₃ plasma modification of polyethylene and polyimide

Jolanta-Ewa Sapieha, O. M. Küttel, Ludvik Martinu and Michael R. Wertheimer

Article (1991)

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Department: Department of Engineering Physics
Research Center: GCM - Thin Film Physics and Technology Research Group
PolyPublie URL: https://publications.polymtl.ca/38268/
Journal Title: Journal of vacuum science and technology. A, Vacuum, surfaces, and films (vol. 9, no. 6)
Publisher: American Vacuum Society
DOI: 10.1116/1.577158
Official URL: https://doi.org/10.1116/1.577158
Date Deposited: 18 Apr 2023 15:26
Last Modified: 25 Sep 2024 16:22
Cite in APA 7: Sapieha, J.-E., Küttel, O. M., Martinu, L., & Wertheimer, M. R. (1991). Dual‐frequency N₂ and NH₃ plasma modification of polyethylene and polyimide. Journal of vacuum science and technology. A, Vacuum, surfaces, and films, 9(6), 2975-2981. https://doi.org/10.1116/1.577158

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