A. M. Wrobel, B. Lamontagne and Michael R. Wertheimer
Article (1988)
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| Department: | Department of Engineering Physics |
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| PolyPublie URL: | https://publications.polymtl.ca/38253/ |
| Journal Title: | Plasma Chemistry and Plasma Processing (vol. 8, no. 3) |
| Publisher: | Springer |
| DOI: | 10.1007/bf01020409 |
| Official URL: | https://doi.org/10.1007/bf01020409 |
| Date Deposited: | 18 Apr 2023 15:26 |
| Last Modified: | 25 Sep 2024 16:22 |
| Cite in APA 7: | Wrobel, A. M., Lamontagne, B., & Wertheimer, M. R. (1988). Large-area microwave and radiofrequency plasma etching of polymers. Plasma Chemistry and Plasma Processing, 8(3), 315-329. https://doi.org/10.1007/bf01020409 |
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