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Large-area microwave and radiofrequency plasma etching of polymers

A. M. Wrobel, B. Lamontagne and Michael R. Wertheimer

Article (1988)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/38253/
Journal Title: Plasma Chemistry and Plasma Processing (vol. 8, no. 3)
Publisher: Springer
DOI: 10.1007/bf01020409
Official URL: https://doi.org/10.1007/bf01020409
Date Deposited: 18 Apr 2023 15:26
Last Modified: 05 Apr 2024 11:32
Cite in APA 7: Wrobel, A. M., Lamontagne, B., & Wertheimer, M. R. (1988). Large-area microwave and radiofrequency plasma etching of polymers. Plasma Chemistry and Plasma Processing, 8(3), 315-329. https://doi.org/10.1007/bf01020409

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