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Plasma-polymerized organosilicon films for use in electronic circuit technology

Edward Sacher, Jolanta-Ewa Sapieha, Henri P. Schreiber and Michael R. Wertheimer

Paper (1982)

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Department: Department of Engineering Physics
Department of Chemical Engineering
PolyPublie URL: https://publications.polymtl.ca/38220/
Conference Title: Conference on Electrical Insulation & Dielectric Phenomena
Conference Location: Amherst, MA, USA
Conference Date(s): 1982-10-17 - 1982-10-21
Publisher: IEEE
DOI: 10.1109/ceidp.1982.7726525
Official URL: https://doi.org/10.1109/ceidp.1982.7726525
Date Deposited: 18 Apr 2023 15:26
Last Modified: 05 Apr 2024 11:32
Cite in APA 7: Sacher, E., Sapieha, J.-E., Schreiber, H. P., & Wertheimer, M. R. (1982, October). Plasma-polymerized organosilicon films for use in electronic circuit technology [Paper]. Conference on Electrical Insulation & Dielectric Phenomena, Amherst, MA, USA. https://doi.org/10.1109/ceidp.1982.7726525

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