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The Effect of Frequency in Plasma Materials Processing

A. Raveh, Reuven Avni, Alfred Grill and Michael R. Wertheimer

Paper (1993)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/38218/
Conference Title: Israel Materials Engineering Conference (IMEC VI)
Conference Location: Haifa, Israel
Conference Date(s): 1993-02-24 - 1993-02-25
Official URL: http://www.iaea.org/inis/collection/NCLCollectionS...
Date Deposited: 18 Apr 2023 15:26
Last Modified: 05 Apr 2024 11:32
Cite in APA 7: Raveh, A., Avni, R., Grill, A., & Wertheimer, M. R. (1993, February). The Effect of Frequency in Plasma Materials Processing [Paper]. Israel Materials Engineering Conference (IMEC VI), Haifa, Israel. http://www.iaea.org/inis/collection/NCLCollectionStore/_Public/24/063/24063194.pdf

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