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Comparison of Process in Radio-Frequency and Microwave Frequency Plasma by Optical Emission Spectroscopy

D. Poitras, O. Kuttel, A. Raveh and Michael R. Wertheimer

Paper (1991)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/38207/
Conference Title: 10th International Symposium on Plasma Chemistry (ISPC-10)
Conference Location: Bochum, Germany
Conference Date(s): 1991-08-04 - 1991-08-09
Official URL: https://www.ispc-conference.org/ispcdocs/ispc10/co...
Date Deposited: 18 Apr 2023 15:26
Last Modified: 05 Apr 2024 11:32
Cite in APA 7: Poitras, D., Kuttel, O., Raveh, A., & Wertheimer, M. R. (1991, August). Comparison of Process in Radio-Frequency and Microwave Frequency Plasma by Optical Emission Spectroscopy [Paper]. 10th International Symposium on Plasma Chemistry (ISPC-10), Bochum, Germany. https://www.ispc-conference.org/ispcdocs/ispc10/content/10/10-2.1-46.pdf

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