Daniel Poitras, O. Kuttel, A. Raveh, Jolanta-Ewa Sapieha
, Ludvik Martinu and Michael R. Wertheimer
Paper (1991)
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| Department: | Department of Engineering Physics |
|---|---|
| Research Center: | GCM - Thin Film Physics and Technology Research Group |
| PolyPublie URL: | https://publications.polymtl.ca/38207/ |
| Conference Title: | 10th International Symposium on Plasma Chemistry (ISPC 1991) |
| Conference Location: | Bochum, Germany |
| Conference Date(s): | 1991-08-04 - 1991-08-09 |
| Official URL: | https://www.ispc-conference.org/ispcdocs/ispc10/co... |
| Date Deposited: | 18 Apr 2023 15:26 |
| Last Modified: | 29 Jul 2025 15:41 |
| Cite in APA 7: | Poitras, D., Kuttel, O., Raveh, A., Sapieha, J.-E., Martinu, L., & Wertheimer, M. R. (1991, August). Comparison of Process in Radio-Frequency and Microwave Frequency Plasma by Optical Emission Spectroscopy [Paper]. 10th International Symposium on Plasma Chemistry (ISPC 1991), Bochum, Germany. https://www.ispc-conference.org/ispcdocs/ispc10/content/10/10-2.1-46.pdf |
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