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Comparison of Processes in Radio-and Microwave Frequency Plasmas by Optical Emission Spectroscopy

Daniel Poitras, Olivier Kuttel, Avi Raveh and Michael R. Wertheimer

Paper (1991)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/38206/
Conference Title: 10th International Symposium on Plasma Chemistry (ISPC-10)
Conference Location: Bochum, Germany
Conference Date(s): 1991-08-04 - 1991-08-09
DOI: 10.13140/rg.2.1.2937.6406
Official URL: https://doi.org/10.13140/rg.2.1.2937.6406
Date Deposited: 18 Apr 2023 15:26
Last Modified: 05 Apr 2024 11:32
Cite in APA 7: Poitras, D., Kuttel, O., Raveh, A., & Wertheimer, M. R. (1991, August). Comparison of Processes in Radio-and Microwave Frequency Plasmas by Optical Emission Spectroscopy [Paper]. 10th International Symposium on Plasma Chemistry (ISPC-10), Bochum, Germany. https://doi.org/10.13140/rg.2.1.2937.6406

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