B. Lamontagne, A. M. Wrobel, G. Jalbert and Michael R. Wertheimer
Article (1987)
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| Department: | Department of Engineering Physics |
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| PolyPublie URL: | https://publications.polymtl.ca/38190/ |
| Journal Title: | Journal of Physics D: Applied Physics (vol. 20, no. 7) |
| Publisher: | IOP Publishing |
| DOI: | 10.1088/0022-3727/20/7/005 |
| Official URL: | https://doi.org/10.1088/0022-3727/20/7/005 |
| Date Deposited: | 18 Apr 2023 15:26 |
| Last Modified: | 25 Sep 2024 16:22 |
| Cite in APA 7: | Lamontagne, B., Wrobel, A. M., Jalbert, G., & Wertheimer, M. R. (1987). Large-area microwave plasma etching of polyimide. Journal of Physics D: Applied Physics, 20(7), 844-844. https://doi.org/10.1088/0022-3727/20/7/005 |
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