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Large-area microwave plasma etching of polyimide

B. Lamontagne, A. M. Wrobel, G. Jalbert and Michael R. Wertheimer

Article (1987)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/38190/
Journal Title: Journal of Physics D: Applied Physics (vol. 20, no. 7)
Publisher: IOP Publishing
DOI: 10.1088/0022-3727/20/7/005
Official URL: https://doi.org/10.1088/0022-3727/20/7/005
Date Deposited: 18 Apr 2023 15:26
Last Modified: 05 Apr 2024 11:32
Cite in APA 7: Lamontagne, B., Wrobel, A. M., Jalbert, G., & Wertheimer, M. R. (1987). Large-area microwave plasma etching of polyimide. Journal of Physics D: Applied Physics, 20(7), 844-844. https://doi.org/10.1088/0022-3727/20/7/005

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